Concepedia

Publication | Closed Access

Nitride film formation by ion and vapour deposition

DOI

45

Citations

6

References

1985

Year

Mamoru Satou, Koji Yamaguchi, Yasunori Andoh, Y. Suzuki, Koji Matsuda, F. Fujimoto
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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