Publication | Closed Access
Profile simulation of high aspect ratio contact etch
28
Citations
5
References
2006
Year
EngineeringMechanicsContact MechanicMechanical EngineeringNumerical SimulationProfile SimulationComputer-aided DesignComputational ElectromagneticsElectronic PackagingComputational MechanicsMulti-physics ModellingPlasma EtchingMultiscale Modeling
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|---|---|---|
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