Journal of the European Ceramic Society · 2009 · 71 citations · 14 references
EngineeringMaterials EngineeringMaterials ScienceInterface ScienceSurface ScienceThin FilmsCoatingsSemiconductor InterfacesSemiconductor SurfacesSilicon MaterialsSubstrate PreparationThin Film AdhesionSiliconSilicon NitrideSubstrate Surface Preparation
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A. B. D. Cassie · Discussions of the Faraday Society · 1948 · 1.7K citations
Surface Oxidation of Silicon Nitride Films
S. I. Raider, R. Flitsch, J. A. Aboaf et al. · Journal of The Electrochemical Society · 1976 · 249 citations