Publication | Closed Access
Effect of growth conditions on the GaN thin film by sputtering deposition
34
Citations
9
References
2006
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsGrowth ConditionsAluminum Gallium NitrideGan Power DeviceThin FilmsMicroelectronicsCategoryiii-v SemiconductorThin Film ProcessingGan Thin Film
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