Concepedia

Silicon self-diffusion in thin SiO2 and PtSi films

R. Pretoriüs, A.P. Botha, J.C. Lombaard

Thin Solid Films · 1981 · 27 citations · 19 references

DOI

Concepts

References

19

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

, , +17

LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM

Akio Hiraki, M.−A. Nicolet, J. W. Mayer · Applied Physics Letters · 1971 · 194 citations · Full text

, , +9

An 18O study of the thermal oxidation of silicon in oxygen

E. Rosencher, A. Straboni, S. Rigo et al. · Applied Physics Letters · 1979 · 162 citations

, , +16

Kinetics and mechanism of platinum silicide formation on silicon

J. M. Poate, T. C. Tisone · Applied Physics Letters · 1974 · 161 citations

, , +16

Introduction to diffusion in semiconductors

B. Tuck · European Solid-State Circuits Conference · 1975 · 151 citations

, , +10