Effect of hot embossing process parameters on polymer flow and microchannel accuracy produced without vacuum

Hot embossing as a method for the fabrication of polymer high aspect ratio structures

Holger Becker, Ulf Heim · Sensors and Actuators A Physical · 2000 · 664 citations

Engineering, Manufacturing Engineering, Materials Science +10

Flow behaviour of thin polymer films used for hot embossing lithography

Laura J. Heyderman, Helmut Schift, Christian Dávid et al. · Microelectronic Engineering · 2000 · 351 citations

Natural Sciences, Materials Engineering, Materials Science +15

Hot embossing in microfabrication. Part I: Experimental

Yi‐Je Juang, L. James Lee, Kurt W. Koelling · Polymer Engineering and Science · 2002 · 149 citations

Engineering, Materials Engineering, Materials Science +16

Low-cost thermoforming of micro fluidic analysis chips

R Truckenm uuml ller, Zeno Rummler, Th. Schaller et al. · Journal of Micromechanics and Microengineering · 2002 · 82 citations

Engineering, Manufacturing Engineering, Materials Engineering +17

Rapid hot embossing of polymer microfeatures

Thomas E. Kimerling, Weidan Liu, Byung H. Kim et al. · Microsystem Technologies · 2006 · 76 citations

Engineering, Manufacturing Engineering, Materials Science +12