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Nanoindentation: a suitable tool to determine local mechanical properties in microelectronic packages and materials?

EngineeringMicromechanicsMechanical EngineeringLocal Mechanical PropertiesNanoscale ModelingNanometrologyElectronic PackagingNanomechanicsMaterials EngineeringMaterials ScienceFabrication TechniqueSolid MechanicsMicroelectronic PackagesMicrostructureMechanical PropertiesMicrofabricationApplied PhysicsSuitable ToolMechanics Of Materials