Thin Solid Films · 1981 · 49 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsOpticsSemiconductor DevicesLaser Material ProcessingLaser PhysicsLaser Surface ProcessingOxidation ReactionsSilicon MaterialsSurface OxidationLaser Surface OxidationSemiconductor OxidationSilicon Oxidation
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