Active nitrogen species dependence on radiofrequency plasma source operating parameters and their role in GaN growth - Concepedia

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Active nitrogen species dependence on radiofrequency plasma source operating parameters and their role in GaN growth

76

Citations

4

References

2005

Year

E. Iliopoulos, A. Adikimenakis, Emmanouil Dimakis, K. Tsagaraki, G. Konstantinidis, A. Georgakilas

Journal of Crystal Growth

Radiofrequency Plasma SourceGan GrowthApplied PhysicsGan Power DeviceCategoryiii-v Semiconductor

References

	Year	Citations

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