Water as reactive gas to prepare titanium oxynitride thin films by reactive sputtering - Concepedia

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Water as reactive gas to prepare titanium oxynitride thin films by reactive sputtering

62

Citations

35

References

2003

Year

J.M. Chappé, Nicolas Martin, G. Terwagne, Jan Lintymer, Joseph Gavoille, J. Takadoum

Thin Solid Films

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringSurface ScienceReactive GasReactive SputteringThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingAnodizing

References

	Year	Citations

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