Publication | Closed Access
Inverse analysis of material removal data using a multiscale CMP model
13
Citations
12
References
2003
Year
Numerical AnalysisEngineeringMechanical EngineeringMaterial Removal DataMulti-resolution ModelingMaterial SelectionInverse ProblemsComputer-aided DesignInverse AnalysisComputational MechanicsMultiscale Cmp ModelMultiscale Modeling
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