Concepedia

Studies of radiofrequency plasma deposition of hexamethyldisiloxane films and their thermal stability and corrosion resistance behavior

Arup Choudhury, Joyanti Chutia, H. Kakati, S.A. Barve, Arup R. Pal, Neelotpal Sen Sarma, D.S. Patil

Vacuum · 2010 · 25 citations · 40 references

DOI

Concepts

References

40

The identification of molecular spectra

Journal of the Franklin Institute · 1951 · 2.3K citations

, , +9

Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

J. W. Coburn, Min Chen · Journal of Applied Physics · 1980 · 880 citations

, , +16

Handbook of deposition technologies for films and coatings

Peter M. Martin · 2010 · 412 citations

, , +12

RF compensated probes for high-density discharges

Isaac D. Sudit, F F Chen · Plasma Sources Science and Technology · 1994 · 314 citations

, , +13

Spectroscopic diagnostics of CF4-O2 plasmas during Si and SiO2 etching processes

Riccardo d’Agostino, F. Cramarossa, S. De Benedictis et al. · Journal of Applied Physics · 1981 · 303 citations

, , +16