Publication | Closed Access
Fabrication of refractive microlenses in semiconductors by mask shape transfer in reactive ion etching
39
Citations
5
References
1997
Year
Materials ScienceElectrical EngineeringMask Shape TransferRefractive MicrolensesEngineeringBeam LithographyMicrofabricationApplied PhysicsPattern TransferMicro-optical ComponentMicroelectronicsPlasma EtchingOptoelectronicsNanolithography MethodReactive Ion
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