Achieving reproducibility needed for manufacturing semiconductor tunnel devices

C. Shao, J. Sexton, M. Missous, Michael J. Kelly

Electronics Letters · 2013 · 10 citations · 6 references

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Abstract

Fifty years after tunnelling through semiconductor heterojunctions was originally investigated, the present authors are the first to demonstrate the required reproducibility, in wafer, between wafers in a given growth run, and from run to run, of the electrical properties required for manufacturing a microwave and millimetre‐wave detector based on electron tunnelling through a thin semiconductor tunnel barrier layer.

References

6