Publication | Closed Access
Amorphous hydrogenated fluorinated carbon films produced by PECVD
23
Citations
21
References
1996
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringCarbon-based MaterialFluorinated Carbon FilmsThin FilmsCarbon-based FilmsFunctional Materials
| Year | Citations | |
|---|---|---|
Page 1
Page 1