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Homogeneous and heterogeneous thermal decomposition rates of trimethylgallium and arsine and their relevance to the growth of GaAs by MOCVD

Materials EngineeringIi-vi SemiconductorElectrical EngineeringEngineeringPhysicsApplied PhysicsSemiconductor MaterialMicroelectronicsCompound SemiconductorCategoryiii-v Semiconductor