Stabilized formation of tetragonal ZrO2 thin film with high permittivity - Concepedia

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Stabilized formation of tetragonal ZrO2 thin film with high permittivity

25

Citations

19

References

2014

Year

Kimihiko Kato, Takatoshi Saito, Shigehisa Shibayama, Mitsuo Sakashita, Wakana Takeuchi, Noriyuki Taoka, Osamu Nakatsuka, Shigeaki Zaima

Thin Solid Films

Materials ScienceMaterial AnalysisEngineeringHigh PermittivityOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsThin Film Processing

References

	Year	Citations

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