Concepedia

Ellipsometry measurements on SiO2 films for thicknesses under 200Å

Jau Hwang Ho, Chung Len Lee, Chein Wei Jen, Tan Fu Lei

Solid-State Electronics · 1987 · 19 citations · 20 references

DOI

Concepts

References

20

<i>Ellipsometry and Polarized Light</i>

R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard · Physics Today · 1978 · 4.3K citations

, , +13

<i>Optical Properties of Thin Solid Films</i>

O.S. Heavens, Stefan Singer · Physics Today · 1956 · 1.4K citations

, , +12

Ellipsometry and Polarized Light

J.P.G. Farr · Surface Technology · 1978 · 1.1K citations

, , +9

Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry

Frank L. McCrackin, Robert R. Stromberg, Harold L. Steinberg · Journal of Research of the National Bureau of Standards Section A Physics and Chemistry · 1963 · 618 citations · Full text

, , +17

Electron mean escape depths from x−ray photoelectron spectra of thermally oxidized silicon dioxide films on silicon

R. Flitsch, S. I. Raider · Journal of Vacuum Science and Technology · 1975 · 258 citations

, , +17