Concepedia

Preparation of strontium titanate thin films by mirror-confinement-type electron cyclotron resonance plasma sputtering

So Baba, Ken Numata, Hidenori Saito, Toshiyuki Ueno, Bunkei Kyoh, Shoji Miyake

Thin Solid Films · 2001 · 15 citations · 15 references

DOI

Concepts

References

15

Algorithms for the rapid simulation of Rutherford backscattering spectra

Lawrence Doolittle · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 2.8K citations

, , +10

Thermal and non-thermal interaction of microwave radiation with materials

Josemon Jacob, L. H. L. Chia, Freddy Boey · Journal of Materials Science · 1995 · 296 citations

, , +14

Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream

Morito Matsuoka, Kenichi Ono · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 109 citations

, , +8

Deposition and Electrical Characterization of Very Thin SrTiO<sub>3</sub> Films for Ultra Large Scale Integrated Dynamic Random Access Memory Application

Cheol Seong Hwang, Soon Oh Park, Chang Seok Kang et al. · Japanese Journal of Applied Physics · 1995 · 82 citations

, , +17

Formation of hillocks in Pt/Ti electrodes and their effects on short phenomena of PZT films deposited by reactive sputtering

Hyo‐Jin Nam, Duck‐Kyun Choi, Won-Jong Lee · Thin Solid Films · 2000 · 76 citations

, , +17