Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

David Larsson, Anders Greve, J. M. Hvam, Anja Boisen, Kresten Yvind

Applied Physics Letters · 2009 · 22 citations · 11 references

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Abstract

We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was ∼60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed.

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