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EngineeringMaterials EngineeringMaterials ScienceMicrofabricationHeavy-ion PhysicsMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningHeavy Ion RadiationHeavy-ion AcceleratorsHeavy-ion Reactions
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G. G. Bentini, M. Bianconi, Marco Chiarini et al. · Journal of Applied Physics · 2002 · 149 citations
Natural Sciences, Materials Engineering, Materials Science +16
G. G. Bentini, M. Bianconi, L. Correrá et al. · Journal of Applied Physics · 2004 · 94 citations
Natural Sciences, Materials Engineering, Materials Science +16