Damage created in silicon by BF+ (1≤ n ≤ 3) and PF+ (1⪯ n:≤ 5) implantations - Concepedia

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Damage created in silicon by BF+ (1≤ n ≤ 3) and PF+ (1⪯ n:≤ 5) implantations

29

Citations

10

References

1987

Year

A. Grob, Jean‐Jacques Grob, A. Golański

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

	Year	Citations

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