ON THE NUMBER OF ATOMS DISPLACED BY IMPLANTED IONS OR ENERGETIC RECOIL ATOMS

Peter Sigmund

Applied Physics Letters · 1969 · 346 citations · 11 references

Concepts

Abstract

The validity of the Kinchin-Pease formula is re-examined on the basis of recent progress in the theory of collision cascades and irradiation experiments on semiconductors and metals.

References

11