Journal of Crystal Growth · 1993 · 66 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsAluminum OxidesChemical Vapor DepositionCoatingsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsAlumina Thin FilmsAluminum NitrideChemical Vapor Deposition CoatingsChemical Vapor Deposition MaterialsNitrides Thin FilmsVapour Diffusion
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The fundamentals of chemical vapour deposition
W. A. Bryant · Journal of Materials Science · 1977 · 211 citations