Concepedia

X-ray diffraction determination of texture and internal stresses in magnetron PVD molybdenum thin films

M. Zaouali, J. L. Lebrun, Patrice Gergaud

Surface and Coatings Technology · 1991 · 26 citations · 4 references

DOI

Concepts

References

4

Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron source

David W. Hoffman, John A. Thornton · Journal of Vacuum Science and Technology · 1982 · 256 citations

, , +17

Compressive stress and inert gas in Mo films sputtered from a cylindrical-post magnetron with Ne, Ar, Kr, and Xe

David W. Hoffman, John A. Thornton · Journal of Vacuum Science and Technology · 1980 · 128 citations

, , +17

X-ray macrostress determination on textured material; use of the ODF for calculating the X-ray compliances

M.C. Barral, J. L. Lebrun, Jean‐Michel Sprauel et al. · Metallurgical Transactions A · 1987 · 67 citations

, , +4

Physical vapor-deposited TiN on cemented carbide: Tempering effects

A.J. Perry, L. Chollet · Surface and Coatings Technology · 1988 · 16 citations

, , +16