Japanese Journal of Applied Physics · 1974 · 10 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceOpticsSpectroscopyThin FilmsAbsorption SpectroscopyOptical InstrumentsOptical SpectroscopyOptical Thin FilmsThin Film Optical PropertiesThin-film DepositionOptical CharacterizationOptical Thin Film CharacterizationSpectral CharacteristicsThin Oxide FilmsThin-film Optical CharacterizationVacuum Deposition
An optical monitoring system, which can measure spectral characteristics of thin films during vacuum deposition process, has been developed. The system consists of (1) optical system, (2) rapid scanning spectrometer and (3) signal processor. Using this device, the change of some characteristics of films caused by air-inlet is studied for several materials. The inhomogeneity of ZrO2 films evaporated on a glass substrate at 300°C is also sturdied.