Concepedia

Publication | Closed Access

Argon-dominated plasma beam generated by filtered vacuum arc and its substrate etching

DOI

15

Citations

11

References

2009

Year

Hideto Tanoue, Masao Kamiya, Shinichiro Oke, Yoshiyuki Suda, Hirofumi Takikawa, Yushi Hasegawa, Makoto Taki, Masao Kumagai, Makoto Kano, Takeshi Ishikawa,
Applied Surface Science

References

YearCitations

Page 1