Publication | Closed Access
DLC thin film preparation by cathodic arc deposition with a super droplet-free system
105
Citations
7
References
2002
Year
Materials ScienceCathodic Arc DepositionEngineeringMicrofabricationSurface ScienceApplied PhysicsSuper Droplet-free SystemThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingThin-film Technology
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