Reduction of charge injection into PECVD SiNxHy by control of deposition chemistry - Concepedia

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Reduction of charge injection into PECVD SiNxHy by control of deposition chemistry

24

Citations

11

References

1990

Year

Donald L. Smith, Andrew S. Alimonda, Chau‐Chen Chen, H.C. Tuan

Journal of Electronic Materials

Materials ScienceChemical EngineeringEngineeringChemical DepositionCharge ExtractionDeposition ChemistryPecvd SinxhyCharge Injection

References

	Year	Citations

Page 1