Concepedia

Chau‐Chen Chen

CC

3

Publications

294

Citations

3

H-Index

1990

Active since

Affiliations

Palo Alto Research Center(Current)

Chau‐Chen Chen is an author at Palo Alto Research Center specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

1990–1993

3

Publications

3

Mechanism of SiN x  H  y Deposition from  NH 3 ‐ SiH4 Plasma

Donald L. Smith, Andrew S. Alimonda, Chau‐Chen Chen et al. · Journal of The Electrochemical Society · 1990 · 245 citations

, , +20

Enhancement of low-temperature critical epitaxial thickness of Si(100) with ion beam sputtering

Donald L. Smith, Chau‐Chen Chen, Greg B. Anderson et al. · Applied Physics Letters · 1993 · 25 citations

, , +18

Reduction of charge injection into PECVD SiNxHy by control of deposition chemistry

Donald L. Smith, Andrew S. Alimonda, Chau‐Chen Chen et al. · Journal of Electronic Materials · 1990 · 24 citations

, , +5

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