Publication | Closed Access
Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry
326
Citations
29
References
2003
Year
Materials ScienceEngineeringApplied PhysicsSiliceneSemiconductor Device FabricationNanometrologyMicrocrystalline SiliconAmorphous SolidSilicon On InsulatorMicrostructure
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