Publication | Closed Access
High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering
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Citations
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References
2010
Year
Materials ScienceMaterials EngineeringHigh Rate DepositionEngineeringSurface ScienceApplied PhysicsThin Film Process TechnologyPulse PowerThin FilmsPulsed Laser DepositionChemical DepositionThin Film ProcessingThick Crn
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