Evaluation of magnetron-sputtered TiB2 intended for tribological applications

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Material selection for hard coatings

H. Holleck · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +17

A simple model for the formation of compressive stress in thin films by ion bombardment

C. A. Davis · Thin Solid Films · 1993 · 808 citations

Natural Sciences, Materials Science, Physics +15

Intrinsic stress in sputter-deposited thin films

H. Windischmann · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1992 · 644 citations

Natural Sciences, Materials Engineering, Materials Science +14