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Surface-chemistry-sensitive spectral features of In–Ga–Zn–O thin film: Cleaned, air-passivated, and sputter-phase-separated surfaces

Materials ScienceSurface CharacterizationThin Film PhysicsIn–ga–zn–o Thin FilmEngineeringSputter-phase-separated SurfacesOxide ElectronicsSurface ScienceApplied PhysicsSurface-chemistry-sensitive Spectral FeaturesSurface AnalysisThin Film Process TechnologyThin FilmsThin Film Processing