On the determination of optical constants of films

Abstract

A method is presented for determining the optical constants of films which have a slightly rough upper surface and which are somewhat optically inhomogeneous along the normal to the film surface. It is shown how the RMS height of surface irregularities, the value of introduced parameter a describing the optical and inhomogeneity and film thickness can be calculated on the basis of measured transmittance and reflectance in the region of interference fringes.