Silicon surface passivation by hot-wire CVD Si thin films studied by in situ surface spectroscopy - Concepedia

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Silicon surface passivation by hot-wire CVD Si thin films studied by in situ surface spectroscopy

19

Citations

24

References

2009

Year

J. J. H. Gielis, Bram Hoex, P.J. van den Oever, M. C. M. van de Sanden, W. M. M. Kessels

Thin Solid Films

Situ Surface SpectroscopyElectrical EngineeringEngineeringSilicon On InsulatorSurface ScienceApplied PhysicsSemiconductor Device FabricationElectronic PackagingThin FilmsChemical Vapor DepositionSilicon Surface PassivationThin Film Processing

References

	Year	Citations

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