MRS Proceedings · 1990 · 13 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSolid State PhysicsAmorphous MaterialsAmorphous SemiconductorsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSilicon MaterialsAmorphous SiliconElectronic Density Of StatesIonizationSemiconductor CharacterizationSilicon CharacterizationSilicon EpitaxySilicon Impurities
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