Concepedia

Synthesis of silicon oxynitride layers by dual ion-implantation and their annealing behaviour

Alka R. Chauhan, Geeta Bhatt, A.D. Yadav, S. K. Dubey, T.K. Gundu Rao

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 11 citations · 11 references

DOI

Concepts

References

11

Electron Paramagnetic Resonance, Techniques and Applications

R. S. Alger, R. N. Rogers · American Journal of Physics · 1969 · 167 citations

, , +4

Electron Paramagnetic Resonance: Techniques and Applications

M A H McCausland · Physics Bulletin · 1969 · 76 citations

, , +17

On the formation of silicon oxynitride by ion implantation in fused silica

A. Carnera, P. Mazzoldi, A. Boscolo‐Boscoletto et al. · Journal of Non-Crystalline Solids · 1990 · 58 citations

, , +6

Formation of thin Si3N4 films by nitrogen ion implantation into silicon

A.D. Yadav, M.C. Joshi · Thin Solid Films · 1979 · 44 citations

, , +9

Rutherford backscattering analysis of oxide layers formed by ion implantation into single-crystal silicon

S.S. Gill, I. H. Wilson · Thin Solid Films · 1978 · 41 citations

, , +9