On the formation of silicon oxynitride by ion implantation in fused silica - Concepedia

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On the formation of silicon oxynitride by ion implantation in fused silica

58

Citations

14

References

1990

Year

A. Carnera, P. Mazzoldi, A. Boscolo‐Boscoletto, F. Caccavale, Renzo Bertoncello, Gaetano Granozzi, I Spagnol, G. Battaglin

Journal of Non-Crystalline Solids

Materials ScienceIon ImplantationEngineeringNanotechnologyFused SilicaApplied PhysicsSiliceneSilicon On InsulatorSilicon Oxynitride

References

	Year	Citations

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