A micromachined vibration sensor based on the control of power transmitted between optical fibres

Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide

Torben Storgaard‐Larsen, S. Bouwstra, Otto Leistiko · Sensors and Actuators A Physical · 1996 · 54 citations

Engineering, Electrical Engineering, Materials Science +15

A micromachined pressure sensor with fiber-optic interferometric readout

Meng-Ying Chan, Scott D. Collins, R. L. Smith · Sensors and Actuators A Physical · 1994 · 49 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +13

Sensing means and sensor shells: a new method of comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors

Massood Tabib‐Azar, Augusto Garcı́a-Valenzuela · Sensors and Actuators A Physical · 1995 · 39 citations

Engineering, Electrical Engineering, Materials Science +13

Fibre-optic accelerometer using silicon micromachining techniques

Jeanine Marty, Abdelrafik Malki, C. Renouf et al. · Sensors and Actuators A Physical · 1995 · 29 citations

Engineering, Electrical Engineering, Instrumentation +13

MEMS versus MOMS from a systems point of view

A.J. Jacobs-Cook · Journal of Micromechanics and Microengineering · 1996 · 21 citations

Engineering, Electrical Engineering, Mechanical Engineering +13