Torben Storgaard‐Larsen

A new measurement microphone based on MEMS technology

P.R. Scheeper, B. Nordstrand, Bin Liu et al. · Journal of Microelectromechanical Systems · 2003 · 121 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide

Torben Storgaard‐Larsen, S. Bouwstra, Otto Leistiko · Sensors and Actuators A Physical · 1996 · 54 citations

Engineering, Electrical Engineering, Materials Science +15

Plasma‐Enhanced Chemical Vapor Deposited Silicon Oxynitride Films for Optical Waveguide Bridges for Use in Mechanical Sensors

Torben Storgaard‐Larsen, Otto Leistiko · Journal of The Electrochemical Society · 1997 · 35 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Silicon microphones - a Danish perspective

S. Bouwstra, Torben Storgaard‐Larsen, P.R. Scheeper et al. · Journal of Micromechanics and Microengineering · 1998 · 25 citations

Engineering, Audiology, Electrical Engineering +10