Publication | Closed Access
Smoothing of interfaces in ultrathin Mo/Si multilayers by ion bombardment
19
Citations
8
References
1993
Year
Materials ScienceEngineeringPhysicsNanoelectronicsSurface ScienceApplied PhysicsIon BombardmentSemiconductor MaterialMultilayer HeterostructuresSemiconductor Device FabricationSilicon On InsulatorMicroelectronics
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