Ion bombardment of X-ray multilayer coatings: Comparison of ion etching and ion assisted deposition - Concepedia

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Ion bombardment of X-ray multilayer coatings: Comparison of ion etching and ion assisted deposition

32

Citations

5

References

1991

Year

E. J. Puik, M.J. van der Wiel, H. Zeijlemaker, J. Verhoeven

Applied Surface Science

Materials ScienceIon ImplantationIon EtchingEngineeringIon BombardmentSurface ScienceApplied PhysicsPlasma EtchingX-ray Multilayer CoatingsPlasma ProcessingDepth-graded Multilayer Coating

References

	Year	Citations

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