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Amorphous aluminum silicate films by metal-organic chemical vapor deposition using aluminum-tri-sec-butoxide and tetraethyl orthosilicate

Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsThin FilmsTetraethyl OrthosilicateAmorphous SolidChemical DepositionChemical Vapor DepositionThin Film Processing