Vacuum · 2013 · 80 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsMetal-semiconductor ContactsSemiconductor SurfacesSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsContact MaterialsMagnetron SputteringPassivation LayersSputter DepositionThin Film Deposition MaterialsThin Film Surface CharacterizationThin-film Interface Engineering
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Tin doped indium oxide thin films: Electrical properties
Radhouane Bel Hadj Tahar, Takayuki Ban, Yutaka Ohya et al. · Journal of Applied Physics · 1998 · 910 citations · Full text