Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

Natural Sciences, Materials Science, Physics +7

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations

Natural Sciences, Materials Engineering, Materials Science +14

Metrological characterization of X-ray diffraction methods for determination of crystallite size in nano-scale materials

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Natural Sciences, Materials Engineering, Materials Science +17

Charged particle fluxes from planar magnetron sputtering sources

B. Window, N. Savvides · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 419 citations

Natural Sciences, Electrical Engineering, Physics +13

Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering

J. E. Greene, J.‐E. Sundgren, Lars Hultman et al. · Applied Physics Letters · 1995 · 395 citations

Natural Sciences, Materials Engineering, Materials Science +15