Publication | Closed Access
Electrical characteristics of oxygen precipitation related defects in Czochralski silicon wafers
12
Citations
11
References
1996
Year
Materials ScienceElectrical CharacteristicsElectrical EngineeringEngineeringApplied PhysicsCzochralski Silicon WafersOxygen PrecipitationDefect FormationSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorDefect ToleranceElectrical Insulation
| Year | Citations | |
|---|---|---|
Page 1
Page 1