Concepedia

Hiroshi Koya

HK

Statistics

Publications

3

Citations

38

H-Index

3

Active since

1995

Affiliations

Mitsubishi Materials (Japan)(Current)

Hiroshi Koya is an author at Mitsubishi Materials (Japan) specializing in materials science, electronic materials, and silicon wafers.

Publications per year

1995–1997

3

Publications

3

Effect of SC1 Process on Silicon Surface Microroughness and Oxide Breakdown Characteristics

Kazuhiro Akiyama, Nobumasa Naito, Motoaki Nagamori et al. · Japanese Journal of Applied Physics · 1995 · 14 citations

, , +17

The Effect of Hydrogen Annealing on Oxygen Precipitation Behavior and Gate Oxide Integrity in Czochralski Si Wafers

Hidenobu Abe, Isamu Suzuki, Hiroshi Koya · Journal of The Electrochemical Society · 1997 · 12 citations

, , +17

Electrical characteristics of oxygen precipitation related defects in Czochralski silicon wafers

F.‐G. Kirscht, Y. Furukawa, W. Seifert et al. · Materials Science and Engineering B · 1996 · 12 citations

, , +15

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