Concepedia

Hollow cathode plasma sources for large area surface treatment

Hana Baránková, Ladislav Bárdoš

Surface and Coatings Technology · 2001 · 72 citations · 10 references

DOI

Concepts

References

10

Fused hollow cathode cold atmospheric plasma

Hana Baránková, Ladislav Bárdoš · Applied Physics Letters · 2000 · 45 citations

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Cleaning of metal parts in oxygen radio frequency plasma: Process study*

D. Korzec, J. Rapp, D. Theirich et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 43 citations · Full text

, , +16

Cathode Sputtering in Hollow Cathode Discharges

Toshimitsu Musha · Journal of the Physical Society of Japan · 1962 · 34 citations

, , +11

Effect of gas and cathode material on the r.f. hollow cathode reactive PVD

Hana Baránková, Ladislav Bárdoš · Surface and Coatings Technology · 1999 · 28 citations

, , +11

Plasma enhanced chemical vapor deposition using forced flow through hollow cathodes

Frank Jansen, D. Kuhman, Charles R. Taber · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 22 citations

, , +17