Optical techniques for on-line measurement of surface topography

<i>Ellipsometry and Polarized Light</i>

R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard · Physics Today · 1978 · 4.3K citations

Natural Sciences, Physics, Optics +13

Ellipsometry and Polarized Light

J.P.G. Farr · Surface Technology · 1978 · 1.1K citations

Natural Sciences, Mathematics, Physics +9

Relation Between Surface Roughness and Specular Reflectance at Normal Incidence

H. E. Bennett, J. O. Porteus · Journal of the Optical Society of America · 1961 · 1.1K citations

Engineering, Materials Engineering, Materials Science +16

Reflection of electromagnetic waves from slightly rough surfaces

S. O. Rice · Communications on Pure and Applied Mathematics · 1951 · 1.1K citations

Natural Sciences, Electrical Engineering, Physics +14

Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry

D. E. Aspnes, J. B. Theeten, F. Hottier · Physical review. B, Condensed matter · 1979 · 1K citations

Natural Sciences, Materials Engineering, Materials Science +17